NASA NTRS · 19780052133
Some performance tests of a microarea AES
Abstract
An Auger electron spectroscopy (AES) system which has a submicron analysis capability is described. The system provides secondary electron imaging, as well as micro- and macro-area AES. The resolution of the secondary electron image of an oxidized Al contact pad on a charge-coupled device chip indicates a primary beam size of about 1000 A. For Auger mapping, a useful resolution of about 4000 A is reported
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Todd, G., Poppa, H.. 1978-04-01. Some performance tests of a microarea AES. https://ntrs.nasa.gov/citations/19780052133
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