Wise, Kensall D. | Search NASA

NASA NTRS1995

A Microinstrumentation System for Remote Environmental Monitoring

This paper reports on a hybrid micro-instrumentation system that includes a embedded micro-controller, transducers for monitoring environmental parameters, interface/readout electronics for linking the controller and the transducers, and custom circuitry for system power management. Sensors for measuring temperature, pressure, humidity, and acceleration are included in the initial system, which operates for more than 180 days and dissipates less than 700 microW from a 6V battery supply. The sensor scan rate is adaptive and can be event triggered. The system communicates internally over a 1 MHz, nine-line intramodule sensor bus and outputs data over a hard-wired serial interface or a 315MHz wireless link. The use of folding platform packaging allows an internal system volume as small as 5 cc.

Mason, Andrew↗

NASA NTRS1994

JTEC Panel report on microelectromechanical systems in Japan

This report summarizes recent activities in the development of microelectromechanical systems (MEMS) in Japan. For the purposes of this study, 'MEMS' means batch-fabricated miniature devices that convert physical parameters to or from electrical signals and that depend on mechanical structures or parameters in important ways for their operation. The report covers advanced materials and process technology; sensors and sensing microstructures; microactuators and actuation mechanisms; sensor-circuit integration and system partitioning; advanced packaging, microassembly, and testing technologies; and MEMS design techniques, applications, and infrastructure. The panel found that Japanese industry is emphasizing approaches to MEMS that are similar to those taken by U.S. industry (i.e., approaches based on silicon integrated-circuit technology); these efforts are comparable in their level of development to those in the United States. However, the ten-year, $250 million, MITI-sponsored program in micromachines emphasizes the miniaturization of more traditional (nonlithographic) machining processes, an area in which there is no comparable U.S. effort. Packaging technology and applications for batch-fabricated MEMS devices is considered a major challenge in both countries. The panel concluded that these and other issues will require global leadership and international cooperation to realize the benefits of MEMS in a timely way.

Wise, Kensall D.↗

NASA NTRS1987

Microscopic Gas-Flow Controller

Proposed flow-controlling and -measuring device made by batch solid-state microelectronic-fabrication techniques. Device contains ultrasensitive silicon capacitive pressure transducer, gas-flow channels etched in silicon wafer, and integrated microvalves. Used to control and monitor low gas flows at low pressures.

Wise, Kensall D.↗