NASA NTRS · 19870000415
Microscopic Gas-Flow Controller
Abstract
Proposed flow-controlling and -measuring device made by batch solid-state microelectronic-fabrication techniques. Device contains ultrasensitive silicon capacitive pressure transducer, gas-flow channels etched in silicon wafer, and integrated microvalves. Used to control and monitor low gas flows at low pressures.
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Wise, Kensall D.. 1987-09-01. Microscopic Gas-Flow Controller. https://ntrs.nasa.gov/citations/19870000415
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