Engineering topics
Xu, Weihe
Publications and source records attributed to Xu, Weihe.
Machine learning-aided automatic and precise focal length estimation of multilayer Laue lenses for high-resolution hard x-ray microscopy
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A versatile high-speed x-ray microscope for sub-10 nm imaging
We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II.
Five-analyzer Johann spectrometer for hard X-ray photon-in/photon-out spectroscopy at the Inner Shell Spectroscopy beamline at NSLS-II: design, alignment and data acquisition
Here, a recently commissioned five-analyzer Johann spectrometer at the Inner Shell Spectroscopy beamline (8-ID) at the National Synchrotron Light Source II (NSLS-II) is presented. Designed for hard X-ray photon-in/photon-out spectroscopy, the spectrometer achieves a resolution in the 0.5–2 eV range, depending on the element and/or emission line, providing detailed insights into the local electronic and geometric structure of materials. It serves a diverse user community, including fields such as physical, chemical, biological, environmental and materials sciences. This article details the mechanical design, alignment procedures and data-acquisition scheme of the spectrometer, with a particular focus on the continuous asynchronous data-acquisition approach that significantly enhances experimental efficiency.
A machine-learning-based approach for angular alignment of 2D multilayer Laue lenses for high-resolution hard x-ray microscopy
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Achieving High-Resolution Hard X-ray Microscopy using Monolithic 2D Multilayer Laue Lenses
This article introduces the 2D multilayer Laue lens (MLL) nanofocusing optics recently developed for high-resolution hard X-ray microscopy. The new optics utilized a micro-electro-mechanical-system (MEMS)-based template to accommodate two linear MLL optics in a pre-aligned configuration. Angular misalignment between the two lenses was controlled in tens of millidegrees, and the lateral position error was on a micrometer scale. Using the developed 2D MLLs, an astigmatism-free point focus of approximately 14 nm by 13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy was obtained. In conclusion, the success of 2D MLL optics with an approaching 10 nm resolution is a significant step forward for the development of high-resolution hard X-ray microscopy and applications of MLL optics in the hard X-ray community.
Machine-learning-based automatic small-angle measurement between planar surfaces in interferometer images: A 2D multilayer Laue lenses case
Here, we report a new machine-learning-based approach to automatically measure the small angle between multiple planar surfaces characterized by white light interferometers. By applying an unsupervised clustering algorithm, DBSCAN (Density-Based Spatial Clustering of Applications with Noise), the multiple surfaces in an interferometer image are automatically identified as distinct surfaces. The angles between every two surfaces are then calculated through the surface fitting. This method can be applied to multiple surfaces regardless of their shapes and locations and significantly simplifies the angle measurement procedure. Using the developed method, we have demonstrated a quick and precise angle measurement for the alignment of 2D Multilayer Laue Lenses (MLLs) for the development of high-resolution x-ray microscopy. This automatic, accurate, and robust small-angle measurement method is compatible with widely used white light interferometers and can be further applied to other metrology applications of interferometer results.
Piezoelectric property of PZT nanofibers characterized by resonant piezo-force microscopy
Nano-piezoelectric materials have drawn tremendous research interest. However, characterization of their piezoelectric properties, especially measuring the piezoelectric strain coefficients, remains a challenge. Normally, researchers use an AFM-based method to directly measure nano-materials’ piezoelectric strain coefficients. But, the extremely small piezoelectric deformation, the influence from the parasitic electrostatic force, and the environmental noise make the measurement results questionable. In this paper, a resonant piezo-force microscopy method was used to accurately measure the piezoelectric deformation from 1D piezoelectric nanofibers. During the experiment, the AFM tip was brought into contact with the piezoelectric sample and set to work at close to its first resonant frequency. A lock-in amplifier was used to pick up the sample’s deformation signal at the testing frequency. By using this technique, the piezoelectric strain constant d 33 of the Lead Zirconate Titanate (PZT) nanofiber with a diameter of 76 nm was measured. The result showed that d 33 of this PZT nanofiber was around 387 pm/V. Meanwhile, by tracking the piezoelectric deformation phase image, domain structures inside PZT nanofibers were identified.
Recent advances in nano-scale spatial resolution x-ray microscopy instrumentation at NSLS-II
X-ray microscopy is an invaluable and powerful characterization tool applied in many scientific fields, such as materials science, biology, environmental science, and energy research. In recent years it has been driven by rapid developments of novel technologies and systems resulting in imaging experiments elucidating structural inhomogeneities and chemical reactions at the nanometer scale. To obtain high spatial resolution comprehensive chemical and structural information, an X-ray microscope must be equipped with adequate capabilities and allow for simultaneous acquisition of multiple datasets. In recent years, a number of X-ray microscopes have been designed, constructed, and commissioned at NSLS-II. Here we provide an overview of the microscopy instrumentation development program at NSLS-II and specifically focus on the multilayer Laue lens-based hard X-ray nanoprobe optimized for ~10 nm spatial resolution imaging, its current status, and future upgrades along with recently constructed Kirkpatrick-Baez based scanning microscope designed for ~100 nm spatial resolution experiments.
Metrology of a Focusing Capillary Using Optical Ptychography
The focusing property of an ellipsoidal monocapillary has been characterized using the ptychography method with a 405 nm laser beam. The recovered wavefront gives a 12.5×10.4μm 2 focus. The reconstructed phase profile of the focused beam can be used to estimate the height error of the capillary surface. The obtained height error shows a Gaussian distribution with a standard deviation of 1.3 μm. This approach can be used as a quantitative tool for evaluating the inner functional surfaces of reflective optics, complementary to conventional metrology methods.
Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy
We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.
2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy
Not Available
X-ray Assisted Scanning Tunneling Microscopy and Its Applications for Materials Science: The First Results on Cu Doped ZrTe 3
Synchrotron X-ray Scanning Tunneling Microscopy (SX-STM) is a novel imaging technique capable of providing real space chemically specific mapping with a potential of reaching atomic resolution. Determination of chemical composition along with ultra-high resolution imaging by SX-STM can be realized through excitation of core electrons by incident X-rays when their energy is tuned to an absorption edge of a particular atom during raster scanning, as is done in the conventional STM experiments. In this work, we provide a brief summary and the current status of SX-STM and discuss its applications for material science. In particular, we discuss instrumentation challenges associated with the SX-STM technique and present early experiments on Cu doped ZrTe 3 single crystals.
Focusing of hard X-rays with monolithic two-dimensional multilayer Laue lenses: technical challenges and current status
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Stitching interferometry for synchrotron mirror metrology at National Synchrotron Light Source II (NSLS-II)
With the fast development of diffraction-limited storage rings and free electron lasers, the requirement for ultimate quality X-ray mirror is getting higher and the mirror surface needs to approach the sub-nm root mean square height specifications. Here, these ultimate specifications challenge the X-ray mirror metrology community. In this work, we present our developed dedicated stitching metrology platform for X-ray mirror metrology. Various stitching methods with different stitching parameters are investigated in our stitching interferometric system. Some experimental results are given to demonstrate its validity and performance. According to the measurement results, the repeatability of measuring a flat mirror in the software stitching mode is at 0.1 nm RMS level. In relative angle determinable stitching mode when measuring a curved mirror with its radius of curvature varying from 50 m to 175 m, the repeatability is around 1 nm RMS.
Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline
A transmission X-ray microscope (TXM) has been designed and commissioned at the 18-ID Fullfield X-ray Imaging (FXI) beamline at the National Synchrotron Light Source-II (NSLS-II). This instrument operates in the 5-11 keV range, and, with the current set of optics, is capable of 30 nm spatial resolution imaging, with a field of view (FOV) of about 40 microns. For absorption contrast, the minimum exposure time for a single projection image is about 20 ms and an entire 3D tomography data set can be acquired in under one minute. The system enables tomographic reconstructions with sub-50 nm spatial resolution without the use of markers on the sample or corrections for rotation run-outs.
High-speed raster-scanning synchrotron serial microcrystallography with a high-precision piezo-scanner
The Frontier Microfocus Macromolecular Crystallography (FMX) beamline at the National Synchrotron Light Source II with its 1 µm beam size and photon flux of 3 × 10 12 photons s −1 at a photon energy of 12.66 keV has reached unprecedented dose rates for a structural biology beamline. The high dose rate presents a great advantage for serial microcrystallography in cutting measurement time from hours to minutes. To provide the instrumentation basis for such measurements at the full flux of the FMX beamline, a high-speed, high-precision goniometer based on a unique XYZ piezo positioner has been designed and constructed. The piezo-based goniometer is able to achieve sub-100 nm raster-scanning precision at over 10 grid-linepairs s −1 frequency for fly scans of a 200 µm-wide raster. The performance of the scanner in both laboratory and serial crystallography measurements up to the maximum frame rate of 750 Hz of the Eiger 16M's 4M region-of-interest mode has been verified in this work. This unprecedented experimental speed significantly reduces serial-crystallography data collection time at synchrotrons, allowing utilization of the full brightness of the emerging synchrotron radiation facilities.
One-minute nano-tomography using hard X-ray full-field transmission microscope
Full field transmission X-ray microscope (TXM) is a powerful technique for non-destructive 3D imaging with nanometer-scale spatial resolution. However, to date, the typical acquisition time with the hard X-ray TXM at a synchrotron facility is > 10 minutes for a 3D nano-tomography data set with sub-50 nm spatial resolution. This is a significant limit on the types of 3D dynamics that can be investigated using this technique. Here, we present a demonstration of one-minute nano-tomography with sub-50 nm spatial resolution. This achievement is made possible with an in-house designed and commissioned TXM instrument at the Full-field X-ray Imaging (FXI) beamline at the National Synchrotron Light Source-II (NSLS-II) at Brookhaven National Laboratory. This capability represents an order of magnitude decrease in the time required for studying sample dynamics with 10s of nm spatial resolution.