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DOE OSTI · 2475064

A versatile high-speed x-ray microscope for sub-10 nm imaging

Xu, Weihe·Xu, Wei (ORCID:000000030259663X)·Gao, Zirui·Gavrilov, Dmitri (ORCID:0000000181887552)·Yan, Hanfei (ORCID:0000000168240367)·Xu, Huijuan·Bouet, Nathalie (ORCID:0000000258169429)·Zhou, Juan·Smith, Randy (ORCID:0000000314374639)·Ma, Jun (ORCID:0009000239608702)·Huang, Xiaojing (ORCID:0000000160345893)·Chu, Yong S. (ORCID:0000000286245329)·Nazaretski, Evgeny (ORCID:0000000312078174)
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Abstract

We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II.

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36 MATERIALS SCIENCEData acquisitionHard X-raysLaser interferometryNanophotonicsPrecision measurementsPtychographyScanning microscopyX-ray imaging

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Xu, Weihe, Xu, Wei (ORCID:000000030259663X), Gao, Zirui, Gavrilov, Dmitri (ORCID:0000000181887552), Yan, Hanfei (ORCID:0000000168240367), Xu, Huijuan, Bouet, Nathalie (ORCID:0000000258169429), Zhou, Juan, Smith, Randy (ORCID:0000000314374639), Ma, Jun (ORCID:0009000239608702), Huang, Xiaojing (ORCID:0000000160345893), Chu, Yong S. (ORCID:0000000286245329), Nazaretski, Evgeny (ORCID:0000000312078174). 2024-11-15. A versatile high-speed x-ray microscope for sub-10 nm imaging. https://doi.org/10.1063/5.0225904

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