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Optics

Optics: explore 2 source-linked works published from 2002 to 2025, with original documents and citations.

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DOE OSTI2025

Single‐photon emitters in PECVD‐grown silicon nitride films: from material growth to photophysical properties

Abstract Silicon nitride (SiN) is a key material for quantum photonics due to its wide transparency window, high refractive index, low optical losses, and semiconductor foundry compatibility. We study the formation of single‐photon emitters in SiN films grown by plasma‐enhanced chemical vapor deposition (PECVD), exploring their photophysical properties and dependence on growth conditions. Emitters were observed across the entire range of nitrogen‐to‐silicon precursor ratios, from silicon‐rich to nitrogen‐rich conditions, enabled by the low background fluorescence. We demonstrate single‐photon emitters in SiN films with a higher refractive index (1.8–1.9) compared to our previous reports (∼1.7). Notably, nitrogen‐rich, thinner films yield particularly bright emitters with shorter emission lifetimes, likely due to more efficient annealing. Silicon‐rich SiN films exhibit red‐shifted emission, suggesting that composition may provide a mechanism for wavelength tuning. These findings establish the feasibility of emitters formation in foundry standard PECVD tools, advancing the scalability and lab‐to‐fab transition of SiN‐based quantum photonic technologies.

Materials Science↗

NASA NTRS2002

Research Reports: 2001 NASA/ASEE Summer Faculty Fellowship Program

For the thirty-seventh consecutive year, a NASA/ASEE (American Society for Engineering Education) Summer Faculty Fellowship Program was conducted at Marshall Space Flight Center (MSFC). The program was conducted by The University of Alabama in Huntsville and MSFC during the period May 29 - August 3, 2001. Operated under the auspices of the American Society for Engineering Education, the MSFC program, as well as those at other NASA Centers, was sponsored by the University Affairs Office, NASA Headquarters, Washington, DC. The basic objectives of the programs, which are in the thirty-seventh year of operation nationally, are (1) to further the professional knowledge of qualified engineering and science faculty members; (2) to stimulate an exchange of ideas between participants and NASA; (3) to enrich and refresh the research and teaching activities of the participants' institutions; and (4) to contribute to the research objectives of the NASA Centers. The Faculty Fellows spent ten weeks at MSFC engaged in a research project compatible with their interests and background and worked in collaboration with a NASA MSFC colleague. This document is a compilation of Fellows' reports on their research during the summer of 2001.

Avionics↗

Compare source metadata on this page

Work	Published	Source identifier	Source
Single‐photon emitters in PECVD‐grown silicon nitride films: from material growth to photophysical properties	2025-04-29	SC0025620	osti
Research Reports: 2001 NASA/ASEE Summer Faculty Fellowship Program	2002-07-01	20020068792	nasa

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