NASA NTRS · 19660015116
Sputtering ion source Final report, 29 Mar. - 30 Sep. 1963
Abstract
Modified sputtering ion source analyses of solids
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Herzog, R. F. K., Liebl, H. J.. 1963-01-01. Sputtering ion source Final report, 29 Mar. - 30 Sep. 1963. https://ntrs.nasa.gov/citations/19660015116
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