Electron microprobe techniques for failure analysis of silicon planar devices.

Cline, J. E.; Schwartz, S.

NASA NTRS · 19680046276

Electron microprobe techniques for failure analysis of silicon planar devices.

Abstract

Electron microprobe analyzer for failure analysis of silicon planar devices, discussing integrated circuit metallization

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Cline, J. E., Schwartz, S.. 1968-01-01. Electron microprobe techniques for failure analysis of silicon planar devices.. https://ntrs.nasa.gov/citations/19680046276

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