NASA NTRS · 19690054902
Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits.
Abstract
Scanning electron mirror microscope advantages over electron mirror and scanning electron microscopes for examining integrated circuits
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Cline, J. E., Morris, J. M., Schwartz, S.. 1969-04-01. Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits.. https://ntrs.nasa.gov/citations/19690054902
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