NASA NTRS · 19700000210
Technique for producing bipolar and MOS field effect transistors on a single chip
Abstract
Several cycles of photoetching, dopant deposition, and drive-in produce selectively-doped regions and semiconductor junctions within a single chip.
Keep this discovery
Explore connections, maps & timelines
Gallagher, R. C., Williams, D. W.. 1970-04-01. Technique for producing bipolar and MOS field effect transistors on a single chip. https://ntrs.nasa.gov/citations/19700000210
Cite the original work for its findings. Save a collection to share your selection of sources.