NASA NTRS · 19700050279
Electrical reliability of parylene films for device passivation
Abstract
High purity pinhole free films /parylene/ applicability as barrier coating to keep semiconductor surface free from moisture, ions and contaminants
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Lee, S. M., Licari, J. J., Litant, I.. 1970-03-01. Electrical reliability of parylene films for device passivation. https://ntrs.nasa.gov/citations/19700050279
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