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NASA NTRS · 19760000005

Ultra-high-vacuum electrical feedthrough

Abstract

Device for cathodic sputtering utilizes cathode dark-space region adjacent to high negative-potential surfaces. Feedthrough is made of metal and glass, is helium leaktight, and is bakeable; it can be incorporated into any vacuum apparatus.

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BibTeXRIS

Gavaler, J. R., Janocko, M. A.. 1976-03-01. Ultra-high-vacuum electrical feedthrough. https://ntrs.nasa.gov/citations/19760000005

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