Real time reflectometer

Abstract

A real time reflectometer with the particular utility of measuring fairly rapid (transient) changes in the specular reflectance of a sample which is continuously exposed to a perturbing environment is described. A fixed radiation source, a fixed detector, a uniformly rotating sample wheel, and a uniformly rotating optical wheel protect against misalignment problems. The reflectometer operates by comparing the measurings of a reflected signal with that of a reference signal made within fractions of a second of one another. Reflectance is measured in the infrared, visible, and vacuum ultraviolet regions.