NASA NTRS · 19780000451
Testing integrated circuits by photoexcitation
Abstract
System for testing integrated circuits uses photoexcitation to determine quality of internal elements inaccessible to electrical tests. Approach prevents direct monitoring of internal operation of circuit by measurements at external terminals and is superior to electron beam scanning due to nondestructiveness.
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Erickson, J. J., Levy, M. E.. 1979-03-01. Testing integrated circuits by photoexcitation. https://ntrs.nasa.gov/citations/19780000451
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