NASA NTRS · 19780000541
SEM probe of IC radiation sensitivity
Abstract
Scanning Electron Microscope (SEM) used to irradiate single integrated circuit (IC) subcomponent to test for radiation sensitivity can localize area of IC less than .03 by .03 mm for determination of exact location of radiation sensitive section.
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Gauthier, M. K., Stanley, A. G.. 1979-03-01. SEM probe of IC radiation sensitivity. https://ntrs.nasa.gov/citations/19780000541
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