NASA NTRS · 19780005383
Optical scanning tests of complex CMOS microcircuits
Abstract
The new test method was based on the use of a raster-scanned optical stimulus in combination with special electrical test procedures. The raster-scanned optical stimulus was provided by an optical spot scanner, an instrument that combines a scanning optical microscope with electronic instrumentation to process and display the electric photoresponse signal induced in a device that is being tested.
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Levy, M. E., Erickson, J. J.. 1977-10-01. Optical scanning tests of complex CMOS microcircuits. https://ntrs.nasa.gov/citations/19780005383
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