Device for measuring the contour of a surface

Abstract

Light from a source is imaged by a lens onto a surface so that the energy from the source is concentrated into a spot. As the spot across the surface is scanned, the surface moves relative to the point of perfect focus. When the surface moves away from perfect focus the spot increases in size, while the total energy in the spot remains virtually constant. The lens then reimages the light reflected by the surface onto two detectors through two different sized apertures. The light energy going to the two detectors is separated by a beam splitter. This second path of the light energy through the lens further defocuses the spot, but as a result of the different sizes of the apertures in each light detector path, the amount of defocus for each is different. The ratio of the outputs of the two detectors which are indicative of the contour of the surface is obtained by a divider.