NASA NTRS · 19790000431
CMOS/SOS processing
Abstract
Report describes processes used in making complementary - metal - oxide - semiconductor/silicon-on-sapphire (CMOS/SOS) integrated circuits. Report lists processing steps ranging from initial preparation of sapphire wafers to final mapping of "good" and "bad" circuits on a wafer.
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Ramondetta, P.. 1980-04-01. CMOS/SOS processing. https://ntrs.nasa.gov/citations/19790000431
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