NASA NTRS · 19800000537
Producing silicon continuously
Abstract
Fluid-bed vaporization followed by chemical vapor deposition generates large, semiconductor-grade silicon particles. Method is economical, high-volume alternative to conventional batch-processing methods. Harvested chunks, extracted in cyclone separator, are about 0.5 to 1.3 centimeters in diameter. Process is not limited to polymer feedstock; it utilizes any halosilane intermediate used in silicon production.
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Ingle, W. M., Rosler, R. S., Thompson, S.. 1981-04-01. Producing silicon continuously. https://ntrs.nasa.gov/citations/19800000537
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