NASA NTRS · 19800044155
A fully monolithic InSb infrared CCD array
Abstract
Fully monolithic infrared CCD arrays fabricated in InSb are described. The process used in fabrication includes planar junction formation by ion implantation, and an aluminum and SiO2 overlapping CCD gate structure which makes use of conventional chemical and plasma etching. IR detection and readout is demonstrated with the arrays.
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Thom, R. D., Koch, T. L., Langan, J. D., Parrish, W. J.. 1980-01-01. A fully monolithic InSb infrared CCD array. https://ntrs.nasa.gov/citations/19800044155
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