NASA NTRS · 19820004568
Liquid immersion apparatus for minute articles
Abstract
Apparatus is disclosed for immersing minute integrated circuit chips in an etching solution in manufacturing integrated circuits during research and development. The apparatus includes a holder, having a handle and basket support for carrying a removable unitary basket and lid structure where fluid flow-through passages are formed, and wherein graduated openings in the handle provide for adjustably supporting the basket in a breaker at a desired level.
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Belcher, J. G., Jr., Hollis, B. R., Jr.. 1981-09-01. Liquid immersion apparatus for minute articles. https://ntrs.nasa.gov/citations/19820004568
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