NASA NTRS · 19830000302
Improved Electrostatic Optical System
Abstract
Device suitable for molecular epitaxial formation of semiconductor components. Improved electrostatic lens system uses cylindrical mirror as central element between two tubular lenses. Abberations introduced by mirror tend to cancel those introduced by tubular lenses. Result is order-of-magnitude improvement in chromatic or spherical compensation.
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Lewis, B. F.. 1984-04-01. Improved Electrostatic Optical System. https://ntrs.nasa.gov/citations/19830000302
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