Thermal reactor

Abstract

A thermal reactor apparatus and method of pyrolyticaly decomposing silane gas into liquid silicon product and hydrogen by-product gas is disclosed. The thermal reactor has a reaction chamber which is heated well above the decomposition temperature of silane. An injector probe introduces the silane gas tangentially into the reaction chamber to form a first, outer, forwardly moving vortex containing the liquid silicon product and a second, inner, rewardly moving vortex containing the by-product hydrogen gas. The liquid silicon in the first outer vortex deposits onto the interior walls of the reaction chamber to form an equilibrium skull layer which flows to the forward or bottom end of the reaction chamber where it is removed. The by-product hydrogen gas in the second inner vortex is removed from the top or rear of the reaction chamber by a vortex finder. The injector probe which introduces the silane gas into the reaction chamber is continually cooled by a cooling jacket.