NASA NTRS · 19840000317
Preparing InSb Substrates
Abstract
Molecular-beam epitaxial substrates passivated by chloride film growth. Chloride layer produced by direct chlorination, by chloride radicals in solutions, or by formation of preliminary oxide layer followed by chloride substitution.
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Vasquez, R. P., Lewis, B. F., Grunthaner, F. J.. 1985-04-01. Preparing InSb Substrates. https://ntrs.nasa.gov/citations/19840000317
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