Advanced Vapor-Supply Manifold

Abstract

Advanced vapor-supply manifold solves problem of manifold purging. Design virtually eliminates dead gas volumes in manifold system. System incorporates special valve into manifold in way that leaks and contamination problems of previous systems, which use tees and three-port valves, are minimized or eliminated in both main manifold line and in supply line. Of considerable use in gas manifold systems where even small amounts of gaseous impurities constitute problem or where more than one gaseous material used in single system.