NASA NTRS · 19850024128
Silicon sheet surface studies
Abstract
Several activities were performed in the area of silicon sheet surface studies. An interferometry technique was developed for measuring residual stresses in short, thin silicon sheets. Simulation of abrasion of silicon by diamond and by scrating and indentation tests was carried out. The wear rate in silicon was correlated with a wear model.
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Danyluk, S.. 1984-10-01. Silicon sheet surface studies. https://ntrs.nasa.gov/citations/19850024128
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