NASA NTRS · 19850053560
Mechanical proof testing in cell processing
Abstract
Fracture mechanics test methods are applied to evaluate the proof test characteristics of silicon Cz wafers. The results indicate that the strength distribution of silicon wafers is truncated by proof testing and no subcritical crack growth in silicon is observed during proof loading. Mechanical proof testing appears to be an effective method to eliminate weak samples before cell processing.
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Chen, C. P., Leipold, M. H., Ross, R. G.. 1984-01-01. Mechanical proof testing in cell processing. https://ntrs.nasa.gov/citations/19850053560
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