A method of rapidly obtaining concentration-depth profiles from X-ray diffraction

Abstract

A broadened diffraction peak, or intensity band, is observed in the case diffraction from a nonhomogeneous phase in which the variations in compositions result in a range of lattice spacings. An intriguing aspect regarding the relationship between the X-ray diffraction band and the composition-depth profile is the hypersensitivity of the intensity band to the shape of the profile. A number of investigators have sought to use this sensitivity to construct high-precision profiles. Difficulties encountered are related to complications due to intensity broadening, and prohibitive computational requirements. Simulation techniques have provided the most accurate interpretation of the intensity band. However, the involved calculations have been prohibitively long. The present study discusses a technique which has simple computational requirements and is as accurate and flexible as the simulation techniques.