NASA NTRS · 19860000084
Solar-Cell-Junction Processing System
Abstract
System under development reduces equipment costs. Processing system will produce solar-cell junctions on 4 in. (10.2 cm) round silicon wafers at rate of 10 to seventh power per year. System includes non-mass-analyzed ion implanter, microcomputer-controlled, pulsed-electron-beam annealer, and wafertransport system with vacuum interlock. These features eliminate large, expensive magnet and plates, circuitry, and power source otherwise needed for scanning.
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Bunker, S. N., Armini, A. J.. 1986-06-01. Solar-Cell-Junction Processing System. https://ntrs.nasa.gov/citations/19860000084
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