NASA NTRS · 19860000397
Exploiting the Vacuum of Space
Abstract
Molecular-beam epitaxy and other processes tested with minimal contamination. Vacuum experimental facility for outer space creates vacuums higher than those available in terrestrial vacuum chambers. Facility minimizes contamination of work from walls and allows rapid removal of gases and heat generated by experimental processes. Used for processes such as molecular-beam epitaxy (growing semiconductor superlattices), metal/organic chemical vapor deposition, coating mirrors and other optical components, and ultrapurification.
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Naumann, R. J.. 1986-07-01. Exploiting the Vacuum of Space. https://ntrs.nasa.gov/citations/19860000397
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