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NASA NTRS ยท 19870000043

Preventing Cracks in Silicon-Reactor Liners

Abstract

Correct placement helps prevent contamination while eliminating crack-causing deposits. Repositioning quartz liner in silicon fluidized-bed reactor prevents cracking of liner when cools. Liner protects stainless-steel walls of reactor from abrasion by particles in fluidized bed. Prevents contamination of newly formed silicon by material abraded from wall and ensures high-quality product.

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BibTeXRIS

Lutwack, R.. 1987-01-01. Preventing Cracks in Silicon-Reactor Liners. https://ntrs.nasa.gov/citations/19870000043

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