NASA NTRS · 19890000445
Tunnel-Effect Displacement Sensor
Abstract
Tunnel position sensor simple device measuring small displacements or accelerations. Used to make compact, sensitive accelerometers or strain gauges or to measure impacts of particles. Variation in distance between two electrodes measured via variation in tunneling current between them. Tunnel microsensors provide versatility for application as accelerometers, force sensors, strain sensors, particle detectors, and other devices for space applications.
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Kaiser, William J., Waltman, Steven B.. 1989-09-01. Tunnel-Effect Displacement Sensor. https://ntrs.nasa.gov/citations/19890000445
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