Three-dimensional numerical modelling of transport in horizontal MOCVD reactors

Abstract

A systematic three-dimensional study for the MOCVD of gallium arsenide is presented. Numerical solutions, obtained for the system of equations governing the steady state heat, momentum, and mass transfer in horizontal reactors with large and small aspect ratio, are compared with experimental growth rate distributions. The effects on layer thickness uniformity of lateral thermal boundary conditions and susceptor tilt are explored. The validity of a parabolic flow approximation of the equations is also investigated by comparison with the complete three-dimensional treatment.