A 200 MHz surface acoustic wave mass microbalance

Abstract

The principle of operation of the surface acoustic wave (SAW) piezoelectric crystals used as microgravimetric sensors in mass microbalances is discussed. Special attention is given to a SAW 200-MHz crystal developed for measuring molecular deposition on spacecrafts, whose operating frequency does not depend on the thickness of the crystal. The frequency stability of the 200 MHz SAW device is better than 5 x 10 exp -9, which corresponds to a lower limit-of-detection of 3 x 10 exp -12 g for a signal-to-noise ratio of 3. A block diagram of the 200 MHz SAW mass microbalance and a schematic diagram of SAW resonator are presented together with performance data of this device.