High-reflective multilayers as narrowband VUV filters

Abstract

A novel coating has been developed for the 120-230 nm wavelength VUV region which yields significantly higher reflectivity over selectable bandwidths and can be used to fabricate high-performance narrowband reflection filters; the spectral properties of such filters are greatly enhanced through their use in tandem. The coating uses a combination of high and low refractive index dielectric pairs. The proper choice of high-low ratio reduces the effects of VUV absorption for high refractive index films whose extinction coefficient is much higher than for a low-index material.