NASA NTRS · 19950016489
Micro-sensor thin-film anemometer
Abstract
A device for measuring turbulence in high-speed flows is provided which includes a micro-sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14 deg half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.
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Sheplak, Mark, Mcginley, Catherine B., Spina, Eric F., Stephens, Ralph M., Hopson, Purnell, Jr., Cruz, Vincent B.. 1994-11-24. Micro-sensor thin-film anemometer. https://ntrs.nasa.gov/citations/19950016489
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