NASA NTRS · 19960018810
Diffusion-Barrier Contacts For Solar Cells
Abstract
Electrically conductive diffusion barriers of TaSiN prevent diffusion of metal from overlying metal contacts into underlying silicon during processing at high temperature, improving performance during subsequent use in low-intensity light at low temperature.
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Stella, Paul M., Pool, Frederick S., Nicolet, Marc, Iles, Peter A.. 1996-03-01. Diffusion-Barrier Contacts For Solar Cells. https://ntrs.nasa.gov/citations/19960018810
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