Measuring In-Plane Displacements with Variable Sensitivity Using Diffractive Optic Interferometry

Abstract

This paper introduces a method called diffractive optic interferometry (DOI) which allows in-plane displacement components to be measured with variable sensitivity. DOI relies on binary optical elements fabricated as phase-type Dammann gratings which produce multiple diffraction orders of nearly equal intensity. Sensitivity is varied by combining the different wavefronts produced by a conjugate pair of these binary optical elements; a transmission element is used to produce several illumination beams while a reflective element, replicated on the surface of a specimen, provides the reference for the undeformed state. The steps taken to design and fabricate these binary optical elements are described. The specimen grating is characterized, and tested on a disk subjected to diametrical compression. Overall, the results are excellent, with experimental data agreeing to within a few percent of the theoretical predictions.