Diffraction Grating Efficiency Calculations Based on Real Groove Profiles

Abstract

The program we are attempting to bring about combines 3 difficult features, in order to demonstrate accuracy of efficiency predictions: (1) Accurate groove metrology methods on surface relief gratings; (2) Rigorous and usable electromagnetic efficiency calculation codes; (3) Accurate efficiency measurements in polarized light The benefit would be an increase in yield for high-performance gratings. Many such applications suffer long lead time or serious performance loss when new gratings are made which do not meet requirements or expectations.