Sub-ppb Oxygen and Moisture Contaminant Detection in Semi-Conductor Processing

Man, Kin F.; Said, Boumselleck

NASA NTRS · 20060036321

Sub-ppb Oxygen and Moisture Contaminant Detection in Semi-Conductor Processing

Abstract

This paper describes a technique for measuring trace quantities of oxygen and moisture contaminants present in a somi-conductor and/or containerless processing environment.

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ontaminant Detection, Sub-ppb Oxygen, Semi-Conductor, Semi-Conductor Processing,containerless processing

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BibTeX RIS

Man, Kin F., Said, Boumselleck. 1996-05-12. Sub-ppb Oxygen and Moisture Contaminant Detection in Semi-Conductor Processing. https://ntrs.nasa.gov/citations/20060036321

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