NASA NTRS · 20060036396
Silicon Bulk Micromachined Vibratory Gyroscope
Abstract
This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center.
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Tang, T. K., Gutierrez, R. C., Wilcox, J. Z., Stell, C., Vorperian, V., Calvet, R., Li, W. J., Charkaborty, I., Bartman, R., Kaiser, W. J.. 1996-06-02. Silicon Bulk Micromachined Vibratory Gyroscope. https://ntrs.nasa.gov/citations/20060036396
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