A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft
In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.
MEMS micro-electromechanical system microspacecraf↗