NASA NTRS · 20060036861
A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft
Abstract
In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.
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Tang, T. K., Gutierrez, R. C., Stell, C. B., Vorperian, V., Arakaki, G. A., Rice, J. T., Li, W. J., Chakraborty, I., Shceglov, K., Wilcox, J. Z., Kaiser, W. J.. 1997-01-26. A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft. https://ntrs.nasa.gov/citations/20060036861
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