NASA NTRS · 20060038623
Proximity Effect Corrected Phase Holograms in PMMA
Abstract
Computer generated phase holograms have been fabricated by E-Beam lithography in PMMA using patterned exposure and subsequent partial development.
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Maker, P., Muller, R.. 1993-06-01. Proximity Effect Corrected Phase Holograms in PMMA. https://ntrs.nasa.gov/citations/20060038623
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