NEMS for space and terrestrial applications

Abstract

Nanoscale electromechanical systems (NEMS) techniques were used to manufacture a membrane used to supply singly charged un-fractured ions for mass spectrometry. The innovative nanostructure, developed at the Jet Propulsion Laboratory (JPL), is a major advance over micromachined 'volcano' field ionization devices and filaments or other energy-intensive devices, achieving nearly 100% ionization of gases and vapors without appreciable fracture.