NASA NTRS · 20060041818
Depth Measurements Using Alpha Particles and Upsettable SRAMs
Abstract
A custom designed SRAM was used to measure the thickness of integrated circuit over layers and the epi-layer thickness using alpha particles and a test SRAM. The over layer consists of oxide, nitride, metal, and junction regions.
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Buehler, M. G., Reier, M., Soli, G. A.. 1995-03-01. Depth Measurements Using Alpha Particles and Upsettable SRAMs. https://ntrs.nasa.gov/citations/20060041818
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