NASA NTRS · 20080005159
Split-resonator integrated-post MEMS gyroscope
Abstract
A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.
Keep this discovery
Explore connections, maps & timelines
Bae, Youngsam, Hayworth, Ken J., Shcheglov, Kirill V.. 2004-09-28. Split-resonator integrated-post MEMS gyroscope. https://ntrs.nasa.gov/citations/20080005159
Cite the original work for its findings. Save a collection to share your selection of sources.