NASA NTRS · 20110011951
Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications
Abstract
This miniature or micro-sized semiconductor sensor design provides direct, nonintrusive measurement of skin friction or wall shear stress in fluid flow situations in a two-axis configuration. The sensor is fabricated by microelectromechanical system (MEMS) technology, enabling small size and multiple, low-cost reproductions. The sensors may be fabricated by bonding a sensing element wafer to a fluid-coupling element wafer. Using this layered machine structure provides a truly three-dimensional device.
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Bajikar, Sateesh S., Scott, Michael A., Adcock, Edward E.. 2011-04-01. Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications. https://ntrs.nasa.gov/citations/20110011951
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