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NASA NTRS · 20210005585

Radiation Response of a MEMS Accelerometer: An Electrostatic Force

Swift, G. M.·Lee, C. I.·Edmonds, L. D.
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Abstract

Particle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage.

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ParticleirradiationelectrostaticforcemicroelectromechanicalsystemMEMS

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Swift, G. M., Lee, C. I., Edmonds, L. D.. 1998-07-20. Radiation Response of a MEMS Accelerometer: An Electrostatic Force. https://ntrs.nasa.gov/citations/20210005585

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