NASA NTRS · 20230014234
Advancing Next Generation Microshutter Arrays for Future Astronomical Space-Based Observatories
Abstract
The main objective was to reduce front-to back run-out-error and minimize wafer bow. We focused on: - DRIE recipe optimization - Gas flows - Etch timing - Power changes - Test of different substrates - Pyrex - Sapphire - Test of wafer adhesives
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Regis Brekosky. Advancing Next Generation Microshutter Arrays for Future Astronomical Space-Based Observatories. https://ntrs.nasa.gov/citations/20230014234
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